Z-axis motor cover
A Z-axis servo motor with integrated power-off braking device belongs to the field of semiconductor chip device manufacturing, in order to solve the problem that the braking device of the existing Z-axis servo motor is not fast enough and the braking torque is not large enough.
It consists of a Z-axis servo motor and a power-off brake device. The power-off brake device includes an annular side wall, a fixed friction plate, a spacing positioning sleeve, a tooth cog, a frictional friction piece, a movable friction piece, an elastic device and an electromagnet. The coil and the annular side wall are fixed on the end cover of the Z-axis servo motor, the electromagnet coil is sleeved on the outer side of the Z-axis motor shaft of the Z-axis servo motor, and the elastic device is arranged between the movable friction piece and the Z-axis servo motor end cover. The inlaid friction piece is sleeved on the outer side of the Z-axis motor shaft, and the toothed gear is located between the Z-axis motor shaft and the tooth-inserted friction piece, and is slidingly coupled with the tooth-inserted friction piece, and the fixed friction piece is sleeved outside the Z-axis motor shaft, and Z A spacing positioning sleeve is arranged between the end faces of the shaft servo motor. Z-axis drive for silicon transfer robots.